Sulfur hexafluoride Gas

Industries Applications

1. Electronics In semiconductor manufacturing, sulfur hexafluoride is a fluorine source for high density plasma etching without generating carbon by-products. SF6 can be used for etching metal silicides (specially tungsten etchback), nitrides and oxides versus their metal substrates.     Other industries

• Sulfur hexafluoride is a insulating material used as a dielectric in electrical transformers.
• SF6 can be used as a inert blanketing agent.
• SF6 is a tracer gas for determining ventilation rates and air movements in buildings.

Gas Properties

• Molecular weight  : 146.05 g/mol
• Solid phase
• Latent heat of fusion (1,013 bar, at triple point) : 39.75 kJ/kg

Liquid phase

• Liquid density (at triple point) : 1880 kg/m3
• Boiling point (Sublimation) : -63.9 °C
• Latent heat of vaporization (1.013 bar at boiling point) : 162.2 kJ/kg
• Vapor pressure (at 21 °C or 70 °F) : 21.5 bar

Critical point

• Critical temperature  : 45.5 °C
• Critical pressure  : 37.59 bar
• Triple point
• Triple point temperature  : -49.4 °C
• Triple point pressure  : 2.26 bar

Gaseous phase

• Gas density (1.013 bar and 15 °C (59 °F)) : 6.27 kg/m3
• Compressibility Factor (Z) (1.013 bar and 15 °C (59 °F)) : 0.9884
• Specific gravity (air = 1) (1.013 bar and 21 °C (70 °F)) : 5.114
• Specific volume (1.013 bar and 21 °C (70 °F)) : 0.156 m3/kg
• Heat capacity at constant pressure (Cp) (1.013 bar and 21 °C (70 °F)) : 0.097 kJ/(mol.K)
• Viscosity (1.013 bar and 0 °C (32 °F)) : 0.000142 Poise
• Thermal conductivity (1.013 bar and 0 °C (32 °F)) : 12.058 mW/(m.K)